| Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion OME Ylivaara, X Liu, L Kilpi, J Lyytinen, D Schneider, M Laitinen, J Julin, ... Thin Solid Films 552, 124-135, 2014 | 201 | 2014 |
| Potku–New analysis software for heavy ion elastic recoil detection analysis K Arstila, J Julin, MI Laitinen, J Aalto, T Konu, S Kärkkäinen, S Rahkonen, ... Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2014 | 195 | 2014 |
| Properties of AlN grown by plasma enhanced atomic layer deposition M Bosund, T Sajavaara, M Laitinen, T Huhtio, M Putkonen, VM Airaksinen, ... Applied Surface Science 257 (17), 7827-7830, 2011 | 152 | 2011 |
| Atomic layer deposition of spinel lithium manganese oxide by film-body-controlled lithium incorporation for thin-film lithium-ion batteries V Miikkulainen, A Ruud, E Østreng, O Nilsen, M Laitinen, T Sajavaara, ... The Journal of Physical Chemistry C 118 (2), 1258-1268, 2014 | 87 | 2014 |
| Bandgap lowering in mixed alloys of Cs 2 Ag (Sb x Bi 1− x) Br 6 double perovskite thin films Z Li, SR Kavanagh, M Napari, RG Palgrave, M Abdi-Jalebi, ... Journal of Materials Chemistry A 8 (41), 21780-21788, 2020 | 85 | 2020 |
| Time-of-flight–Energy spectrometer for elemental depth profiling–Jyväskylä design M Laitinen, M Rossi, J Julin, T Sajavaara Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2014 | 82 | 2014 |
| Atomic layer deposition of ruthenium films from (ethylcyclopentadienyl)(pyrrolyl) ruthenium and oxygen K Kukli, M Kemell, E Puukilainen, J Aarik, A Aidla, T Sajavaara, M Laitinen, ... Journal of The Electrochemical Society 158 (3), D158, 2011 | 72 | 2011 |
| Controlling the crystallinity and roughness of atomic layer deposited titanium dioxide films RL Puurunen, T Sajavaara, E Santala, V Miikkulainen, T Saukkonen, ... Journal of nanoscience and nanotechnology 11 (9), 8101-8107, 2011 | 70 | 2011 |
| ALD grown aluminum oxide submonolayers in dye-sensitized solar cells: The effect on interfacial electron transfer and performance LJ Antila, MJ Heikkila, V Makinen, N Humalamaki, M Laitinen, V Linko, ... The Journal of Physical Chemistry C 115 (33), 16720-16729, 2011 | 70 | 2011 |
| Variation of lattice constant and cluster formation in GaAsBi J Puustinen, M Wu, E Luna, A Schramm, P Laukkanen, M Laitinen, ... Journal of Applied Physics 114 (24), 2013 | 68 | 2013 |
| Atomic layer deposition of Li x Ti y O z thin films V Miikkulainen, O Nilsen, M Laitinen, T Sajavaara, H Fjellvåg RSC advances 3 (20), 7537-7542, 2013 | 55 | 2013 |
| Control of Oxygen Nonstoichiometry and Magnetic Property of MnCo2O4 Thin Films Grown by Atomic Layer Deposition K Uusi-Esko, EL Rautama, M Laitinen, T Sajavaara, M Karppinen Chemistry of Materials 22 (23), 6297-6300, 2010 | 54 | 2010 |
| Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties OME Ylivaara, L Kilpi, X Liu, S Sintonen, S Ali, M Laitinen, J Julin, E Haimi, ... Journal of Vacuum Science & Technology A 35 (1), 2017 | 49 | 2017 |
| Stabilizing organic photocathodes by low-temperature atomic layer deposition of TiO 2 L Steier, S Bellani, HC Rojas, L Pan, M Laitinen, T Sajavaara, F Di Fonzo, ... Sustainable Energy & Fuels 1 (9), 1915-1920, 2017 | 47 | 2017 |
| Atomic layer deposition of Ru films from bis (2, 5-dimethylpyrrolyl) ruthenium and oxygen K Kukli, J Aarik, A Aidla, I Jõgi, T Arroval, J Lu, T Sajavaara, M Laitinen, ... Thin Solid Films 520 (7), 2756-2763, 2012 | 43 | 2012 |
| Strong absorption and ultrafast localisation in NaBiS2 nanocrystals with slow charge-carrier recombination YT Huang, SR Kavanagh, M Righetto, M Rusu, I Levine, T Unold, ... Nature communications 13 (1), 4960, 2022 | 39 | 2022 |
| Programmable proximity aperture lithography with MeV ion beams N Puttaraksa, S Gorelick, T Sajavaara, M Laitinen, S Singkarat, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008 | 35 | 2008 |
| Transition-edge sensors for particle induced X-ray emission measurements MRJ Palosaari, KM Kinnunen, J Julin, M Laitinen, M Napari, T Sajavaara, ... Journal of Low Temperature Physics 176, 285-290, 2014 | 28 | 2014 |
| Recent negative ion source activity at JYFL T Kalvas, O Tarvainen, J Komppula, M Laitinen, T Sajavaara, H Koivisto, ... AIP Conference Proceedings 1515 (1), 349-358, 2013 | 27 | 2013 |
| Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3 G von Gastrow, S Li, M Putkonen, M Laitinen, T Sajavaara, H Savin Applied surface science 357, 2402-2407, 2015 | 24 | 2015 |
